Secondary ion mass spectrometry (SIMS) uses focused high-speed primary ions to produce secondary ions from sample surface that are analyzed through a mass filter. SIMS is often called as ion microprobe, since it offers a micrometer-scale spatial resolution. Although the precision and accuracy of SIMS are not as good as many conventional mass spectrometers, it has several advantages such as small sample-size requirement, high spatial resolution and capability of in-situ analysis. In the field of geochemistry/cosmochemistry, SIMS is widely used for (1) stable isotope geochemistry of H, C, O, S, etc., (2) geochronology of U/Th-bearing minerals, (3) lateral distribution of trace elements in a mineral, and (4) discovery of presolar grains and investigation of their isotopic compositions.