Carbon nanotubes (CNTs) were grown on Ni-coated glass substrates by catalytic chemical vapor depositors (CVD) using RF plasma under $600^{circ}C$. Various types of CNTs were obtained by different growth temperature, etching period and thickness of Ni catalyst. $NH_3$ or $H_2$ gas was used as a etching gas, then $C_2H_2$ gas was flowed as carbon source. Vertically aligned CNTs with diameter of 150 nm and length of 3 $mu extrm{m}$ were observed by SEM. CNTs synthesized by catalytic CVD using RF plasma should be expected to FED emitter.