We have developed a three-axis configurational in situ SMOKE apparatus by which three-dimensional vector magnetization reversal processes are studied for ultrathin Co films grown on a Pd (111) single crystal in the thickness range of spin reorientation transition. This study provides a better understanding of magnetization reversal motions with the knowledge of three components of the magnetization vector at the transition of an easy axis of magnetization from the film normal at 5 ML Co to in-plane at 6 ML Co (ML denotes monolayer). For a 5.25 ML Co, it was observed that a slightly canted magnetization vector from the film normal rotated in the film plane under an applied field direction parallel to the film normal.