The ozone kinetics including ozone auto-decomposition. effect of pH, and solubility were investigated. Diesel decomposition process including TCE & PCE decomposition. effect of hydroxyl radical scavenger, effect of pH, and ozone/$H_2O$$_2$by ozonation process were also examined using deionized water, simulated groundwater. and actual groundwater. Reactions with deionized water and groundwater both stowed the second-order reaction rates, and the reaction rate was much higher in groundwater (half-life of 14.7 min) than in deionized water (hal(half-life of 37.5 min). The reaction rate was accelerated at high pH values in both waters. The use of ozone showed high oxidation rates of TCE. PCE and diesel. Though hydroxyl radical scavengers existing in groundwater were inhibitors for treating diesel, high pH condition and addition of hydrogen peroxide could accelerate to degrade diesel in groundwater, indicating ozone oxidation process could be applied to treating diesel contaminated-groundwater.