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Enhanced Crystallization of Amorphous Si Using viscous Ni Solution and Microwave Annealing
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  • Enhanced Crystallization of Amorphous Si Using viscous Ni Solution and Microwave Annealing
  • Enhanced Crystallization of Amorphous Si Using viscous Ni Solution and Microwave Annealing
저자명
Ahn. Jin-Hyung,Eom. Ji-Hye,Ahn. Byung-Tae
간행물명
Journal of information display
권/호정보
2001년|2권 2호|pp.7-12 (6 pages)
발행정보
한국정보디스플레이학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A viscous Ni solution was coated over amorphous Si thin film for evenly spread of Ni metal source. The Ni s. prepared by dissolving $NiCl_2$ into IN HCI and mixing with propylene glycol. $NiCl_2$ and Ni were deposited on the amorphous film after oven dry and they enabled to obtain a uniform crystallization. The crystallization using the viscous Ni solution was a Ni-silicide mediated process, the same process used with Ni metal layer. The crystallization temperature was lowered to $480^{circ}C$ by the synergy effect of silicide-mediated crystallization and microwave-induced crystallization. Lateral crystallization was also enhanced such that the velocity of lateral crystallization by microwave annealing became faster than by furnace annealing.