Silicon addition in titanium alloys generally results in solid solution hardening by silicon itself and precipitation hardening by titanium silicides. The morphology and distribution of the titanium silicides depend upon the alloy chemistry or the heat treatment condition, and play an important role in improving the mechanical properties of the alloys. In this study, the morphology and crystallographic characteristics of the titanium silicides in the Ti-Fe-Si alloy system were studied. Three types of silicides were found in the alloys; (1) interconnected chain-like silicides at grain boundary, (2) coarse silicides over im, (3) fine silicides smaller than 0.2m. Ti3Si was dominant in cast + HIP condition while Ti5Si3 was dominant in as-cast state. It is recognized that $Ti_5Si_3$$ ightarrow$$Ti_3Si$ transition occurred by the peritectoid reaction and it may be promoted by the pressure during HIP. However, in the case of the fine silicides, $Ti_3Si$ and $Ti_5Si_3$ were found simultaneously even after HIP. Such a fine silicide was found to have a crystallographic orientation relationship with matrix.