- 압전형 AFM 외팔보의 동적거동 해석
- ㆍ 저자명
- 하성규,박성균,김영호
- ㆍ 간행물명
- 한국소음진동공학회논문집
- ㆍ 권/호정보
- 2002년|12권 3호|pp.187-194 (8 pages)
- ㆍ 발행정보
- 한국소음진동공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A seven-port impedance and admittance matrices of multilayered piezoelectric beam are derived for the analysis of piezoelectric AFM ( atomic force microscope) cantilever that is partially covered by the piezoelectric layer. The variational principle is used for deriving the extensional and flexural motional equations and the conjugate parameters. Overall impedance matrix of AFM cantilever can be obtained by combining two impedance matrices of the covered and the non-covered. she resonance and antiresonance frequencies and the effective electromechanical coupling factors are calculated using the derived matrices. The results and the three dimensional finite element solutions are compared with the experimental results in other publication.