The objective of this study is to provide a simple methodology to find optimum processing conditions to fabricate sub-micron structured DVD-RAM substrates with superb optical and geometrical properties. It was fecund that the birefringence, which is regarded as one of the most important optical properties for an optical disk, was very sensitive to the mold wall temperature history. Also, the integrity of the replication, represented by the land-groove structure and the radial tilt were influenced by the mold temperature and the compression pressure. A set of optimum conditions were obtained by applying Design of Experiment and the objective functions composed of three different objectives.