- 전해 크롬도금 대체용으로서의 CrC 스퍼터링에 관한 연구
- ㆍ 저자명
- 임종민,최균석,이종무,Im. Jong-Min,Choe. Gyun-Seok,Lee. Jong-Mu
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2002년|12권 1호|pp.82-88 (7 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Chromium carbide films were deposited on high speed steels using a Cr_3C_2$ target by magnetron sputtering. Effects of the deposition parameters (power, Ar pressure and substrate temperature) on deposition rates and surface roughnesses of the films were investigated. The morphologies of those films were characterized by scanning electron microscopy and atomic force microscopy. The grain size of the samples deposited using dc-power is larger than that using equivalent rf-power. The hardness of the sample increases with increasing rf-power, whereas the elastic modulus nearly does not change with rf-power. The optimum sputter deposition conditions for chromium carbide on high speed steels in the corrosion resistance aspect were found to be the rf-power with small roughness.