- α-Fe2O3/AI2O3(0001) 박막 결정화의 방사광 X-선 산란 연구
- ㆍ 저자명
- 조태식
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2002년|15권 8호|pp.708-712 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The crystallization of amorphous $alpha$-Fe$_2$O$_3$/$alpha$-AI$_2$O$_3$(0001) thin films during thermal annealing in air has been studied using real-time synchrotron x-ray scattering. The well aligned (0.02$^{circ}$/ FWHM) $alpha$-Fe$_2$O$_3$and Fe$_3$O$_4$interfacial crystallites (50- -thick) coexist on the $alpha$-AI$_2$O$_3$(0001) in the sputter-grown amorphous films at room temperature. The amorphous precursor is crystallized to the epitaxial $alpha$-Fe$_2$O$_3$grains in three steps with annealing temperature; i ) the growth of the well aligned $alpha$-Fe$_2$O$_3$interfacial crystallites, together with the transformation of the Fe$_3$O$_4$crystallites to the $alpha$-Fe$_2$O$_3$ crystallites, ii ) the growth of the less aligned (3.08$^{circ}$ FWHM)$alpha$-Fe$_2$O$_3$grains on the well aligned grains (>40$0^{circ}C$), and iii) the nucleation of the other less aligned (1.39$^{circ}$ FWHM) $alpha$-Fe$_2$O$_3$grains directly on the $alpha$-AI$_2$O$_3$substrate (>$600^{circ}C$). The effective thickness thinner than 230 may be very useful for enhancing the epitaxial quality of $alpha$-Fe$_2$O$_3$/AI$_2$O$_3$(0001) thin films.