- 효율적인 p+ 다이버터를 갖는 수평형 트렌치 전극형 IGBT의 제작에 따른 전기적 특성에 관한 연구
- ㆍ 저자명
- 강이구,김상식,성만영
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2002년|15권 9호|pp.750-757 (8 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A new lateral trench LTEIGBT with p+ diverter was proposed to suppress latch-up of LTIGBT The p+ diverter was placed between the anode and cathode electrode. The latch-up of LTEICBT with a p+ diverter was effectively suppressed to sustain an anode voltage of 8.7V and a current density of 1453A/$ extrm{cm}^2$ while in the conventional LTIGBT, latch-up occured at an anode current density of 540A/$ extrm{cm}^2$. In addition, the forward blocking voltage of the proposed LTEIGBT with a p+ diverter was about 140V. The forward blocking voltage of the conventional LTIGBT of the same size was no more than 105V, We fabricated the proposed LTEIGBT with a p+ diverter after the device and process simulation was finished. When the gate voltage is applied 12V, the forward conduction currents of the proposed LTEIGBT with a p+ diverter and the conventional LIGBT are 90㎃ and 70㎃, respectively, at the same breakdown voltage of 150V.