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습도에 따른 DLC 코팅의 마찰 거동
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  • 습도에 따른 DLC 코팅의 마찰 거동
저자명
조경만,안효석,김대은,Jo. Gyeong-Man,An. Hyo-Seok,Kim. Dae-Eun
간행물명
大韓機械學會論文集. Transactions of the Korean Society of mechanical engineers. A. A
권/호정보
2002년|26권 9호|pp.1842-1848 (7 pages)
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Although DLC coatings have good tribological properties, these are dependant on the deposition method, the property of contact surface, and test condition. Humidity, which has little influence on tribological behavior in macro scale, is an important factor of tribological behavior in small devices like MEMS. The objective of this study is to investigate the tribological behavior of DLC coatings with particular attention to their wettability at various humidities. DLC coatings were deposited on Si substrates and tested using a reciprocating friction tester against Si$_3$N$_4$balls at various humidities. The results showed that the tribological behavior of DLC coatings was dependant on relative humidity and wettablility of DLC coatings. Friction coefficient at high relative humidity was higher thar that at low relative humidity. The tungsten-containing DLC coatings had a good wear resistance at low relative humidity whereas DLC coatings derived from argon(Ar)+cesium(Cs) gases showed a good wear resistance at high relative humidity.