For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.