- 마이크로 압전 소자용 후막 PZT의 제조 및 물성 평가
- ㆍ 저자명
- 박준식,박광범,윤대원,박효덕,강성군,최태훈,이낙규,나경환
- ㆍ 간행물명
- 소성가공
- ㆍ 권/호정보
- 2002년|11권 7호|pp.569-574 (6 pages)
- ㆍ 발행정보
- 한국소성가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Recently, thick PZT films are required for the cases of micro piezoelectric devices with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Microstructures, and electrical properties of films were investigated by XRD, FESEM, impedance analyzer, and P-E hysteresis. PZT films with 2.7$mu extrm{m}$ to 4.4${mu}{ extrm}{m}$ thickness were fabricated. Dielectric constant, loss, remnant polarization and coercive field of them were 880~1650 at 1kHz, 2~3% at 1kHz, 26~32 $mu$C/$ extrm{cm}^2$, and 33~60kV/cm, respectively. Also a transverse piezoelectric coefficient $(e_{31,f})$ measurement system was fabricated and tested for thick film samples.