An ultrasonic machining process is efficient and economical means for precision machining of glass and ceramic materials. However, the mechanism of the process with respect to the crack initiation and propagation and the stress development in the ceramic workpiece subsurface arc still not well understood. In this research, we have investigated the basic mechanism of ultrasonic machining of ultrasonic machining of glass by the experimental approach. For this purpose, we designed and fabricated the desktop micro ultrasonic machine. The feed is controlled precisely by using the constant load control system. During machining experiments, the effects of abrasive characteristics and machining conditions on the surface roughness and the material removal rate are measured and compared.