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Structural and Optical Properties of Porous Silicon Prepared by Electrochemical Etching
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  • Structural and Optical Properties of Porous Silicon Prepared by Electrochemical Etching
  • Structural and Optical Properties of Porous Silicon Prepared by Electrochemical Etching
저자명
Lee. Jeong-Seok,Cho. Nam-Hee
간행물명
한국세라믹학회지
권/호정보
2002년|39권 2호|pp.109-112 (4 pages)
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한국세라믹학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The structural and optical features of Porous Silicon(PS) were investigated; the porous silicon was prepared by electrochemical etching of silicon wafers in HF solution. The morphologies and Photoluminescece(PL) features of the PS were investigated in terms of etching time, current density and aging conditions. The average pore diameter and pore depth were determined by current density and etching time, respectively. As-prepared PS exhibited the maximum PL peak at the wavelength of ∼ 450 nm. The degree of deviation from as-prepared PS during aging treatment seemed to depend on the microstructure as well as morphology of the PS. It is found that etching current density played an important role on the microstructural features of the PS.