In this paper, we investigate the effect and the importance of the accuracy of finite element analysis in the shape optimization based on the finite element method and improve the existing finite element which has inaccuracy in some cases. And then, the shape optimization is performed by using the improved finite element. One of the main stream to improve finite element is the prevention of locking phenomenon. In case of bending dominant problems, finite element solutions cannot be reliable because of shear locking phenomenon. In the process of shape optimization, the mesh distortion is large due to the change of the structure outline. So, we have to raise the accuracy of finite element analysis for the large mesh distortion. We cannot guarantee the accurate result unless the finite element itself is accurate or the finite elements are remeshed. So, we approach to more accurate shape optimization to diminish these inaccuracies by improving the existing finite element. The shape optimization using the modified finite element is applied to a two and three dimensional simple beam. Results show that the modified finite element has improved the optimization results.