The sealing performance of an elastomeric O-ring using the double layered material has been analyzed fer the contact stress behaviors that develop between the O-ring seal and the surfaces with which it comes into contact. The leakage of an O-ring will occur when the pressure differential across the seal Just exceeds the initial (or static) peak contact stress. The contact stress behaviors that develop in compressed O-rings, in common case of dovetail grooved geometry, are investigated using the finite element method. The FE analysis includes material hyperelasticity and axisymmetry. The computed FEM results show that the contact stress behaviors are related to the ratio of diameter between the inner ring and the outer ring, and the temperature of vacuum chamber.