The structural integrity of the reactor vessel with the approaching end of life must be assured for pressurized thermal shock. The regulation specifies the screening criteria for this and requires that specific analysis be performed for the reactor vessel which is anticipated to exceed the screening criteria at the end of plant life. In case the screening criteria is exceeded by the deterministic analysis, probabilistic analysis must be performed to show that failure probability Is within the limit. In this study, probabilistic fracture mechanics analysis of the reactor vessel for pressurized thermal shock is performed and the effects of residual stress and master curve on the failure probability are investigated.