- 레이저 직접묘화방법을 이용한 광도파로 제작
- ㆍ 저자명
- 김정민,신보성,김재구,장원석
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2003년|20권 12호|pp.42-47 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The laser direct writing method has some advantages of being maskless, allowing rapid and inexpensive prototyping in comparison to conventional mask-based photolithography. In general, there are two kinds of laser direct writing methods such as the laser ablation method and the laser polymerization method. The laser polymerization method was studied fur manufacturing waveguide in this paper. It is important to reduce line width for image mode waveguides, so some investigations will be carried out in various conditions of process parameters such as laser power, writing speed, focusing height and optical properties of polymer. Experimentally, the optical waveguide was manufactured trapezoid shape. Through SEM the waveguide was 20 ${mu}{ extrm}{m}$ width and 7.4 ${mu}{ extrm}{m}$ height.