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A calculation on the Metal-Film Mixing by Intense Pulse Ion Beam (IPIB)
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  • A calculation on the Metal-Film Mixing by Intense Pulse Ion Beam (IPIB)
저자명
Le. X.Y.,Yan. S.,Zhao. W.J.,Wang. Y.G.,Xue. J.M.
간행물명
韓國眞空學會誌
권/호정보
2003년|12권 1호|pp.74-78 (5 pages)
발행정보
한국진공학회
파일정보
정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, we studied, by numerical calculation, a system, which was composed of metal-film and metal-substrate irradiated by IPIB with beam ion energy 250 keV, current density 10 to 250 A/$ extrm{cm}^2$. While the IPIB irradiation was going on, an induced effect named mixing occurred. In this case, metal-film and part of metal-substrate melted and mixed. The mixing state was kept as it was in melting phase due to the fast cooling rate. Our works were simulating the heating and cooling process via our STEIPIB program and tried to find proper parameters for a specific film-substrate system, 500 nmtitanium film coated on aluminum, to get best mixing results. The parameters calculated for such Ti-Al system were compared with the experimental results and were in good accordance to the experimental results.