- 폐슬러지를 이용한 SiC 합성에 관한 열역학적 고찰
- Thermodynamic Consideration for SiC synthesis by Using Sludged Silicon Powder
- ㆍ 저자명
- 최미령,김영철
- ㆍ 간행물명
- 한국반도체장비학회지
- ㆍ 권/호정보
- 2003년|2권 1호|pp.21-24 (4 pages)
- ㆍ 발행정보
- 한국반도체및디스플레이장비학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Sludged silicon powders that are generated during silicon ingot slicing process have potential usage as silicon source in fabricating silicon carbide powders by adding carbon. A thermodynamic calculation is performed to consider a plausible formation condition for the silicon carbide powders. A thin silicon oxide layer around silicon powder is sufficient to supply equilibrium oxygen partial pressure at the formation temperature($1400^{circ}C$) of the silicon carbide in the Si-C-O ternary system. Formation of silicon carbide by using the sludged silicon powders is more efficient than by using silicon oxide powders.