There are now the plating process that have many hazardous factor cause of the using numerous noxious chemical and bad working environments. The purpose of the study is to make a selection of suitable safety evaluation method that can analyze and righteously find with numerous hazardous factor of the plating process. And another purpose is to systematically adjust the risk of plating process by comprehension of the role of process, equipment, and source material. Therefore, these studies are carried out in the following three investigations of this report. The first research understands the injurious human health and environment by analyzing hazardous material based on the MSDS. To evaluate the safety of process and compartment, the second research is proposed the security secure counterproposal by using the FMEA and the HAZOP. The final research is devoted to systematically analyze the hazard by applying for reasonable guide word and doing the HAZOP for hazardous factor in specific process.