This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.