- 자기 베어링 기술을 이용한 유도형 변위센서 개발
- ㆍ 저자명
- 노명규,박병철,노승국,경진호,박종권
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2004년|21권 4호|pp.72-78 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, a development of an inductive position sensor is described. The sensor is similar to a radial magnetic bearing in that the sensor stator is shaped like a heteropolar magnetic bearing and is driven by a switching amplifier. A demodulation filter extracts the gap information from the switching current ripples. A prototype sensor exhibits the resolution of $0.43mum$ and the dynamic bandwidth of about 800Hz. The dynamic performance can be improved by increasing the switching frequency. However, the eddy current effects become noticeable at high switching frequency, thus limiting the improvement of the bandwidth.