In this paper, we proposed the compensation structures for the enhanced directivity of CPW(Coplanar waveguide) directional couplers with finite-extent backed conductor. The proposed compensation structures are. realized by expanding the slot width between signal line and ground plane in center region of couplers. The CPW couplers with expanded slot have the same phase velocity for even and odd mode because of added inductance and changed capacitance appropriately, so the enhanced directivity is accomplished. The designed CPW directional couplers have good directivity and matching characteristic at center frequency in simulation and measurement.