This paper subscribes the measurement system that can position the target to measure by moving 2-axis stage, which is controlled by the data from image processing technique. The high resolution camera and lens are used in measurement of micro mechanical part, but the region of measurement is very small. It is necessary the re-positioning to measure several regions in one part. The system described in this paper has the accuracy with about $0.9mu extrm{m}$ resolution per one pixel and can be applied to measure micro mechanical part.