- 리니어모터를 이용한 초정밀 유정압안내면 개발
- ㆍ 저자명
- 박천홍,오윤진,황주호,이득우
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2004년|21권 6호|pp.139-144 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${mu}{ extrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${mu}{ extrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${mu}{ extrm}{m}$ of positioning error and 0.09 ${mu}{ extrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${mu}{ extrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.