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나노 복화(複畵)공정을 이용한 PDMS 스탬프 제작
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  • 나노 복화(複畵)공정을 이용한 PDMS 스탬프 제작
저자명
박상후,임태우,양동열,공홍진,Park. Sang-Hu,Lim. Tae-Woo,Yang. Dong-Yol,Kong. Hong-Jin
간행물명
大韓機械學會論文集. Transactions of the Korean Society of mechanical engineers. A. A
권/호정보
2004년|28권 7호|pp.999-1005 (7 pages)
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A new stamp fabrication technique for the soft lithography has been developed in the range of several microns by means of a nano-replication printing (nRP) process. In the nRP process, a figure or a pattern can be replicated directly from a two-tone bitmap figure with nano-scale details. A photopolymerizable resin was polymerized by the two-photon absorption which was induced by a femtosecond laser. After the polymerization of master patterns, a gold metal layer (about 30 ㎚ thickness) was deposited on the fabricated master patterns for the purpose of preventing a join between the patterns and the PDMS, then the master patterns were transferred in order to fabricate a stamp by using the PDMS (poly-dimethylsiloxane). In the transferring process, a few of gold particles, which were isolated from the master patterns, remained on the PDMS stamp. A gold selective etchant, the potassium iodine (KI) was employed to remove the needless gold particles without any damage to the PDMS stamp. Through this work, the effectiveness of the nRP process with the PDMS molding was evaluated to make the PDMS stamp with the resolution of around 200 ㎚.