This study surveys the microscopic wear of CVD TiN coatings in repeated sliding, using the SEM Tribosystem as in-situ system. According to the research, the depth of wear groove and the specific wear amount are changed by the transition of the microscopic wear mode. This investigation leads to the fact that the change of wear characteristics produces the transition of the wear mode. In this survey, four modes are observed for CVD TiN coatings with the thickness of 1.6$mu extrm{m}$: ploughing, powder formation, flake formation and coating delimitation. The microscopic wear properties is quantitatively evaluated in terms with the microscopic wear mode and the specific wear amount. These relationships prove that the observation of wear modes with a SEM Tribosystem is useful to evaluate wear properties.