For the burrs formed in machining are irregular and very sharp in shape, it is usually very difficult to measure burr accurately. It was proved that micro burr geometry can be measured imprecision by the Conoprobe sensor using conoscopic holography method. We developed 3D burr measurement system using this sensor. The system is composed of Conoprobe sensor, XY table, controller and 3D measurement program. Some measurements using the developed system are conducted for the burrs formed in micro drilling and piercing. Specific software fur burr measurement includes several function, calculation of burr volume, average burr height. Burs formed on a curved surface were compensated and measured successfully using the basic surface compensation function.