- 연성된 MEMS 자이로스코프 모델의 설계를 위한 진동 해석
- ㆍ 저자명
- 방선호,신상하,유홍희
- ㆍ 간행물명
- 한국소음진동공학회논문집
- ㆍ 권/호정보
- 2004년|14권 8호|pp.655-660 (6 pages)
- ㆍ 발행정보
- 한국소음진동공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Vibration analysis for a coupled MEMS gyroscope design is presented in this paper. Slight mistuning in fabricated MEMS gyroscopes often leads to significant difference of vibration characteristics between expected and real designs. This difference frequently results in a negative effect to the MEMS gyroscope performance. As long as the coupling between excited and sensed motions exists, such difference inevitably occurs. In this paper, dimensionless parameters that govern the vibration characteristics of coupled MEMS gyroscope are identified and the effects of the parameters on the vibration characteristics are investigated.