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Feedback Control for Expanding Range and Improving Lineraity of Microaccelerometers
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  • Feedback Control for Expanding Range and Improving Lineraity of Microaccelerometers
  • Feedback Control for Expanding Range and Improving Lineraity of Microaccelerometers
저자명
박용화,박상준,최병두,고형호,송태용,임근원,허건수,박장현,조동일,Park. Yong-Hwa,Park. Sang-Jun,Choi. Byung-Doo,Ko. Hyoung-Ho,Song. Tae-Yong,Lim. Genu-Won,Huh
간행물명
제어·자동화·시스템공학 논문지
권/호정보
2004년|10권 11호|pp.1082-1088 (7 pages)
발행정보
제어로봇시스템학회
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정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paer presents a feedback-controlled, MEMS-fabricated microaccelerometer($mu$XL). The $mu$XL has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis $mu$XL fabricated by sacrificial bulk micromachining(SBM) process. Even though the resolution of the closed-loop system is slightly worse than open-loop system, the bandwidth, linearity, and bias stability are stability are significantly improved. The noise equivalent resolution of open-loop system is 0.615 mg and that of closed-loop system is 0.864 mg. The bandwidths of open-loop and closed-loop system are over 100Hz. The input range, non-linearity and bias stability are improved from $pm10;g;to;pm18g$, from 11.1%FSO to 0.86%FSO, and from 0.221 mg to 0.128 mg by feedback control, respectively.