- 연속 연료공급식 MOCVD법으로 증착시킨 YBCO 박막의 증착조건
- ㆍ 저자명
- 김호진,주진호,최준규,전병혁,김찬중,Kim. Ho-Jin,Joo. Jin-ho,Choi. Jun-Kyu,Jun. Byung-Hyuk,Kim. Chan-Joong
- ㆍ 간행물명
- 한국초전도·저온공학회논문지
- ㆍ 권/호정보
- 2004년|6권 3호|pp.6-11 (6 pages)
- ㆍ 발행정보
- 한국초전도저온공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) films were deposited on MgO(100) and SrTiO$_3$(100) single crystal substrates by cold-wall type MOCVD method using continuous source supplying system. Under the deposition temperature of 740∼76$0^{circ}C$, c-axis oriented YBCO films were obtained. In case of the YBCO films deposited on MgO (100) single crystal substrate, the critical temperature (T$_{c}$) was under 81 K regardless of the deposition conditions, whereas T$_{c}$ of the YBCO films deposited on SrTiO$_3$(100) single crystal substrate was 83∼84 K. The critical current (I$_{c}$) of the YBCO film deposited on SrTiO$_3$(100) single crystal substrate for 30 min was 49 A/cm-width and the critical current density (J$_{c}$) was 0.82 MA/$ extrm{cm}^2$ to film thickness of 0.6 ${mu}{ extrm}{m}$. I$_{c}$ increased to 84.4 A/cm-width as the deposition time increased to 50 min, but J$_{c}$ decreased to 0.53 MA/$ extrm{cm}^2$ to film thickness of 1.8 ${mu}{ extrm}{m}$.rm}{m}$</TEX>.