Process Parameters were studied in synthesis of LiCoO$_2$ Powder by ultrasonic spray Pyrolysis. Concentration of the mixed solution influenced the size, shape, and yield of the synthesized powder. The yield was affected primarily by the height of the solution, and then by the flow rate of a carrier gas. The temperature of the reactor governed the crystallinity and morphology of the powder. LiCoO$_2$ powders were synthesized as a layered high temperature phase above 800$^{circ}C$. The synthesized powders were sphere and secondary Particles consisted of primary particles of 55-70 nm. The secondary Particles became bigger from 0.28 to 1.43 $mu extrm{m}$ as the concentration of the solution was increased from 0.05 to 2.0 M. The 2.0 M solution provided the highest production rate.