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Nano-Mechanical and Tribological Characteristics of Ultra-Thin Amorphous Carbon Film Investigated by AFM
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  • Nano-Mechanical and Tribological Characteristics of Ultra-Thin Amorphous Carbon Film Investigated by AFM
  • Nano-Mechanical and Tribological Characteristics of Ultra-Thin Amorphous Carbon Film Investigated by AFM
저자명
Chung. Koo-Hyun,Lee. Jae-Won,Kim. Dae-Eun
간행물명
KSME international journal
권/호정보
2004년|18권 10호|pp.1772-1781 (10 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

The mechanical as well as tribological characteristics of coating films as thin as a few nm become more crucial as applications in micro-systems grow. Especially, the amorphous carbon film has a potential to be used as a protective layer for micro-systems. In this work, quantitative evaluation of nano-indentation, scratching, and wear tests were performed on the 7nm thick amorphous carbon film using an Atomic Force Microscope (AFM). It was shown that AFM-based nano-indentation using a diamond coated tip can be feasibly utilized for mechanical characterization of ultra-thin films. Also, it was found that the critical load where the failure of the carbon film occurred was about 18${mu}$N by the ramp load scratch test. Finally, the wear experimental results showed that the quantitative wear rate of the carbon film ranged 10$^$-9/~10$^$-8/ ㎣ /N cycle. These experimental methods can be effectively utilized for a better understanding the mechanical and tribological characteristics at the nano-scale.