Elastic and plastic deformation behaviors of the high purity aluminum and the silica glass were studied using nanoindentation and finite element analysis(FEA) techniques. Berkovich- and cone-type indenters were used for the nanoindentation test. Deformation behaviors and nanoindent profiles of elastic, elastic-plastic or plastic materials were clearly visualized by FEA simulation. Effects of the penetration depth and strain hardening on the deformation behavior were examined. Pile-up and sink-in behaviors were studied by using FEA technique. Degree of pile-up or sink-in was found to be a function of the ratio of elastic modulus to yield strength of materials. FEA was found to be an effective method to study deformation behaviors of materials under nanoindentation, especially in the case when pile-up or sink-in phenomena occurred.