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저자명
곽준혁,최낙진,반태현,임연태,김재창,허증수,이덕동,Kwak. Jun-Hyuk,Choi. Nak-Jin,Bahn. Tae-Hyun,Lim. Yeon-Tae,Kim. Jae-Chang,Huh. Jeung-Soo,Lee. Duk-Don
간행물명
韓國軍事科學技術學會誌
권/호정보
2004년|7권 2호|pp.81-87 (7 pages)
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한국군사과학기술학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Semiconductor thick film gas sensors based on tin oxide are fabricated and their gas response characteristics are examined for four simulant gases of chemical warfare agent (CWA)s. The sensing materials are prepared in three different sets. 1) The Pt or Pd $(1,;2,;3;wt.\%)$ as catalyst is impregnated in the base material of $SnO_2$ by impregnation method.2) $Al_2O_3;(0,;4,;12,;20;wt.\%),;In_2O_3;(1,;2,;3;wt.\%),;WO_3;(1,;2,;3;wt.\%),;TiO_2;(3,;5,;10;wt.\%)$ or $SiO_2;(3,;5,;10;wt.\%)$ is added to $SnO_2$ by physical ball milling process. 3) ZnO $(1,;2,;3,;4,;5;wt.\%)$ or $ZrO_2;(1,;3,;5;wt.\%)$ is added to $SnO_2$ by co-precipitation method. Surface morphology, particle size, and specific surface area of fabricated sensing films are performed by the SEM, XRD and BET respectively. Response characteristics are examined for simulant gases with temperature in the range 200 to $400^{circ}C$, with different gas concentrations. These sensors have high sensitivities more than $50\%$ at 500ppb concentration for test gases and also have shown good repetition tests. Four sensing materials are selected with good sensitivity and stability and are fabricated as a sensor array A sensor array Identities among the four simulant gases through the principal component analysis (PCA). High sensitivity is acquired by using the semiconductor thick film gas sensors and four CWA gases are classified by using a sensor array through PCA.