- 위상변화를 이용한 표면탄성파 가스센서
- ㆍ 저자명
- 김진상,정용철,강종윤,김달영,남창우,윤석진,Kim. Jin-Sang,Jung. Yong-Chul,Kang. Chong-Yun,Kim. Dal-Young,Nam. Chang-Woo,Yoon. Seok-Jin
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2005년|14권 3호|pp.186-190 (5 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper describes the development of a surface acoustic wave gas sensor that is designed to detect volatile gas by monitering phase change of output signal as a function of time. The sensor consists of SAW oscillators with a center frequency of 100 MHz fabricated on $128^{circ}$ Y-Z $LiNbO_{3}$ substrates. Experimental results, which show the phase change of output signal under the absorption of volatile gas onto sensors, are presented. The proposed sensor has the properties of high sensitivity compare to the conventional SAW gas sensor and chemical selectivity. Thus, it is thought these results are applicable for use in sensor array of an high performance electronic nose system.