- 고정밀 및 긴 측정범위를 위한 전기용량형 변위 센서
- ㆍ 저자명
- 김무진,문원규,Kim. Moo-Jin,Moon. Won-Kyu
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2005년|14권 4호|pp.219-224 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
In this paper, a contact-type linear encoder-like capacitive displacement sensor (CLECDS) is proposed. It is based on the linear encoder capacitive displacement sensor that consists of two substrates with a series of conducting grating in identical size and it is used as a contact sensor of which the two substrates assembled faced to each other after coated with thin dielectric film. It was confirmed that the prototype of this sensor has resolution of about 126nm and measuring range of 20 mm in the test.