- 압저항형 압력센서를 이용한 초소형 하중센서의 개발
- ㆍ 저자명
- 김우정,조용수,강현재,최시영,Kim. Woo-Jeong,Cho. Yong-Soo,Kang. Hyun-Jae,Choi. Sie-Young
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2005년|14권 4호|pp.237-243 (7 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Strain gauge type load cell is used widely as weight sensor. However, it has problems such as noise, power consumption, high cost and big size. Semiconductor type piezoresistive pressure sensor is practically used in recent for low hysteresis, good linearity, small size, light weight and strong on vibration. In this paper, we have fabricated the piezoresistive pressure sensor and packaged the miniature weight sensor. We packaged the miniature weight sensor by flip-chip bonding between die and PCB for durability, because the weight sensor is directly contacted on a physical solid distinct from air and oil pressure. We measured the characteristics of the weight sensor, which had the output of $10{sim}80$ mV on the weight range of $0{sim}2$ kg. In the result, we could fabricate the weight sensor with an accuracy of 3 %FSO linearity.