In order to determine the wear Properties of PECVD ceramic coatings, wear process was evaluated using the coated pin of Falex Tribosystem. Coating materials deposited wear the TiC, TiN and Ti(CN). An experimental process was established to determine the tribological characteristics of friction and wear behavior under the variation of applied load, temperature and sliding distance by the Falex test machine. The experimental results indicate that TiN coating compared with TiC coating on e materials have e excellent friction and wear characteristics. However TiC coating compared i친 TiN coatings have a low friction coefficient with steel and good thermal stability, and Ti(CN) has the excellent anti-wear properly as well as the superiority of extreme pressure property. Compound coating compared wi simple coatings show improved tribological characteristics.