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E-H Mode Transition Properties of Cylindrical ICP Hg:Kr
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  • E-H Mode Transition Properties of Cylindrical ICP Hg:Kr
  • E-H Mode Transition Properties of Cylindrical ICP Hg:Kr
저자명
Yang. Jong-Kyung,Pack. Kwang-Hyun,Lee. Jong-Chan,Park. Dae-Hee
간행물명
KIEE international transactions on electrophysics and applications
권/호정보
2005년|3호|pp.124-130 (7 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, we designed a cylindrical type light source having an electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the transformer principle, an electrically equivalent circuit cylindrical type light source was analyzed. According to the parameters of electromagnetic induction, which were diameter of coil with cpO.3$~$ 1.2mm, number of turns with 4$~$ 12 turns, distance with 40$~$ l20mm and RF power with 10$~$ 150W, the electrical .md optical properties were measured. When the diameter of the coil was cp0.3mm, number of turns was 8 and distance was 40mm, and the maximum brightness of 29,730 cd/m$^{2}$ was shown with RF power l50W. The relationship between electromagnetic induction and plasma discharges was demonstrated using the mode transition from E-mode to H-mode