- 사파이어 기판 위에 증착된 ZnO 박막의 기판온도와 산소 가스량에 따른 특성
- ㆍ 저자명
- 김재홍,이천,Kim. Jae-Hong,Lee. Cheon
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2005년|18권 7호|pp.652-655 (4 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
ZnO thin films on (001) $Al_2O_3$ substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 nm. The influence of the deposition parameters, such as oxygen gas flow, substrate temperature and laser energy density variation on the properties of the grown film, was studied. The experiments were performed for substrate temperatures in the range of $300~450^{circ}C$ and oxygen gas flow rate of $100~900$ sccm. We investigated the structural and optical properties of ZnO thin films using X-ray diffraction(XRD) and photoluminescence(PL).