A sub-millimeter scale catalytic combustor with a simple plate-shaped combustion chamber was fabricated. A porous ceramics support coated with platinum catalyst was placed in the chamber. The combustor has a gallium arsenide window on the top that is transparent to infrared ray. The temperature distribution in the combustion chamber was measured using infrared thermal imager while hydrogen-air premixture is steadily supplied to the combustor. The area where the catalytic reaction took place broaden for higher flow rate and lower equivalence ratio made activated area in the combustion chamber broaden. The amount of coated platinum catalyst did not affect the reaction. Stop of reaction, which is similar to flame quenching of conventional combustion, was investigated. Large content of heat generation and broad activated area are essential criteria to prevent stop of reaction that has a bad effect on the combustor performance.