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A Swing-Arm On-Machine Inspection Method for Profile Measurement of Large Optical Surface in Lapping Process
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  • A Swing-Arm On-Machine Inspection Method for Profile Measurement of Large Optical Surface in Lapping Process
  • A Swing-Arm On-Machine Inspection Method for Profile Measurement of Large Optical Surface in Lapping Process
저자명
Sung. In Kyoung,Oh. Chang Jin,Lee. Eung Suk,Kim. Ock Hyun
간행물명
Journal of mechanical science and technology
권/호정보
2005년|19권 8호|pp.1576-1581 (6 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Generally, the optical components are fabricated by grinding, lapping, and polishing. And, those processes take long time to obtain such a high surface quality. Therefore, in the case of large optical component, the on-machine inspection (OMI) is essential. Because, the work piece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm method for measuring surface profile of large optical concave mirror. The measuring accuracy and uncertainty for suggested method are studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $3~5;{mu}m$. Those inspection data are provided for correcting the residual figuring error in lapping or polishing processes.