- NiCr 박막의 발열 특성 개선을 위한 순차적 이중 열처리 방법 연구
- ㆍ 저자명
- 권용,노효섭,김남훈,최동유,박진성,Kwon. Yong,Noh. Whyo-Sup,Kim. Nam-Hoon,Cho. Dong-You,Park. Jinseong
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2005년|18권 8호|pp.714-719 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
NiCr thin film was deposited by DC magnetron sputtering on $A;_2O_3$/Si substrate with NiCr (80:20) alloy target. NiCr thin films were annealed at $300^{circ}C,;400^{circ}C,;500^{circ}C,;600^{circ}C,;and;700^{circ}C$ for 6 hr in $H_2$ after annealing at $500^{circ}C$ for 6hr in air atmosphere, respectively. To analyze NiCr thin film properties, the changes of its micro structure were Investigated through field emission scanning electron microscope (FESEM). X-ray photoelectron spectroscopy (XPS) was used to analyze a surface of NiCr thin film. Resistance of NiCr thin film was measured by 4-point probe technique. The generated heats were measured by infrared thermometer through the application of DC voltage (5 V/l2 V). NiCr thin film treated by gradational double annealing process had uniform and small grains. Maximum temperature generated heat by NiCr micro heater was $173^{circ}C$. We expect that our results will be a useful reference in the realization of NiCr micro heater.