It is widely accepted that the reading mechanism of Super-RENS(super-resolution near field structure) and Super-ROM(super-resolution read only memory) is closely related with non-linear temperature dependent material properties such as refractive indices, phase change. Furthermore, the dynamic change of the temperature distribution also an essential part of reading mechanism of Super-RENS/ROM. Therefore, the knowledge of the temperature distribution as a function a time is one of the important keys to reveal the physics of reading mechanism in Super-RENS/ROM. We calculated time-dependent temperature distribution in a 3-dimensional Super-ROM disk structure when moving laser beam is irradiated. With a help of commercial software FEMLAB which employed finite element method, we simulated the temperature distribution of ROM structure whose pit diameter is 120-nm with 50-nm depth. Energy absorption by moving laser irradiation, time variations of heat transfer processes, heat fluxes, heat transfer ratios, and temperature distributions of the complicate 3-dimensional ROM structure have been obtained.