- 고밀도 패턴드 미디어 성형에 관한 연구
- Replication of High Density Patterned Media
- ㆍ 저자명
- 이남석,최용,강신일,Lee. Nam-Seok,Choi. Yong,Kang. Shin-Ill
- ㆍ 간행물명
- 정보저장시스템학회논문집
- ㆍ 권/호정보
- 2005년|1권 2호|pp.192-196 (5 pages)
- ㆍ 발행정보
- 정보저장시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by E-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. The nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. In nano-injection molding process, since the solidified layer, generated during the polymer filling, deteriorates transcribability of nano patterns by preventing the polymer melt from filling the nano cavities, an injection-mold system was constructed to actively control the stamper surface temperature using MEMS heater and sensors. The replicated polymeric patterns using nano-injection molding process were as small as 50 nm in diameter, 150 nm in pitch, and 50 nm in depth. The replicated polymeric patterns can be applied to high density patterned media.