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금속 기판 위에 MOCVD법에 의한 YBCO Coated Conductor용 Y-Sm 산화물 완충층 증착
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  • 금속 기판 위에 MOCVD법에 의한 YBCO Coated Conductor용 Y-Sm 산화물 완충층 증착
  • Deposition of Y-Sm Oxide on Metallic Substrates for the YBCO Coated Conductor by MOCVD Method
저자명
최준규,김민우,전병혁,이희균,홍계원,김찬중,Choi. Jun-Kyu,Kim. Min-Woo,Jun. Byung-Hyuk,Lee. Hee-Gyoun,Hong. Gye-Won,Kim. Chan-Joong
간행물명
Progress in superconductivity
권/호정보
2005년|7권 1호|pp.69-76 (8 pages)
발행정보
한국초전도학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Complex single buffer composed of yttrium and samarium oxide was deposited on the metallic substrates by MOCVD (metal organic chemical vapor deposition) method using single liquid source. Two different types of the substrates with in-plane textures of about $8{sim}10$ degree of Ni and $3at.\%W-Ni$ alloy were used. Y(tmhd: 2,2,6,6-tetramethyl-3,5-heptane dionate)$_3$:Sm(tmhd)$_3$ of liquid source was adjusted to 0.4:0.6 to minimize the lattice mismatch between the complex single buffer and the YBCO. The epitaxial growth of $(Y_{x}Sm_{1-x})_{2}O_3$ was achieved at the temperature higher than $500^{circ}C$ in $O_2$ atmosphere. However, it was found that the formation of NiO accelerated with increasing deposition temperature. By supplying $H_{2}O$ vapor, this oxidation of the substrate could be suppressed throughout the deposition temperatures. We could get the epitaxial growth on pure Ni substrate without the formation of NiO. The competitive (222) and (400) growths were observed at the deposition temperatures of $650~750^{circ}C$, but the (400) growth became dominant above $800^{circ}C$. The $(Y_{x}Sm_{1-x})_{2}O_3$-buffered metallic substrates can be used as the buffer for YBCO coated conductor.